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Evaluation of Ta[sub 2]O[sub 5] as a buffer layer film for integration of microwave tunable Ba[sub 1−x]Sr[sub x]TiO[sub 3] based thin films with silicon substrates
Cole, M. W., Joshi, P. C., Ervin, M., Wood, M., Pfeffer, R. L.Volume:
92
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1505999
File:
PDF, 1.01 MB
english, 2002