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Crystallization of amorphous-silicon films with seed layers of microcrystalline silicon by plasma heating
Kim, Hae-Yeol, Park, Chan-Do, Kang, Youn-Seon, Jang, Kuk-Jin, Lee, Jai-YoungVolume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1289538
File:
PDF, 574 KB
english, 2000