Silicon self-diffusivity measurement in thermal SiO[sub 2]...

Silicon self-diffusivity measurement in thermal SiO[sub 2] by [sup 30]Si/[sup 28]Si isotopic exchange

Mathiot, D., Schunck, J. P., Perego, M., Fanciulli, M., Normand, P., Tsamis, C., Tsoukalas, D.

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Volume:

Year:

2003

Language:

english

Journal:

Journal of Applied Physics

DOI:

10.1063/1.1589168

File:

PDF, 277 KB

english, 2003

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