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[IEEE The 17th Annual SEMI/IEEE ASMC 2006 Conference - Boston, MA (May 22-24, 2006)] The 17th Annual SEMI/IEEE ASMC 2006 Conference - High Volume Manufacturing Ramp In 90nm Dual Stress Liner Technology

Gehres, R., Malik, R., Amos, R., Brown, J., Butt, S., Chan, A., Collins, C., Colwill, B., Davies, B., Gabor, A., Le, N., Lindo, P., Mello, K., Meyette, E., Nastasi, V., Patrick, J., Piper, A., Prakash
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Year:
2006
Language:
english
DOI:
10.1109/asmc.2006.1638793
File:
PDF, 881 KB
english, 2006
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