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Paper No P9: Diffraction on Anisotropic Substrates With Sinosoidal Surface Microrelief
Merkulov, Alexey Y., Belyaev, Victor V., Belyaev, Andrey A., Gorbunov, Artem A.Volume:
44
Language:
english
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/sdtp.19
Date:
September, 2013
File:
PDF, 268 KB
english, 2013