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Stress field effects on the microstructure and properties of a-C:H thin films
Golanski, A., Piazza, F., Werckmann, J., Relihan, G., Schulze, S.Volume:
92
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1506198
File:
PDF, 692 KB
english, 2002