Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2010 Vol. 28; Iss. 6
Multibeam scanning electron microscope: Experimental results
Mohammadi-Gheidari, A., Hagen, C. W., Kruit, P.Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3498749
File:
PDF, 749 KB
english, 2010