Influence of laser annealing on SiOx films properties
Gavrylyuk, O.O., Semchuk, O.Yu., Steblova, O.V., Evtukh, A.A., Fedorenko, L.L., Bratus, O.L., Zlobin, S.O., Karlsteen, M.Volume:
336
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.11.066
Date:
May, 2015
File:
PDF, 1.06 MB
english, 2015