On the kinetics of spatial atomic layer deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2013 Vol. 31; Iss. 1

On the kinetics of spatial atomic layer deposition

Poodt, Paul, van Lieshout, Joep, Illiberi, Andrea, Knaapen, Raymond, Roozeboom, Fred, van Asten, Almie
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4756692
File:
PDF, 1.14 MB
english, 2013
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