Mixing-layer kinetics model for plasma etching and the cellular realization in three-dimensional profile simulator
Guo, Wei, Bai, Bo, Sawin, Herbert H.Volume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3085722
File:
PDF, 1.08 MB
english, 2009