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Thin layer composition profiling with angular resolved x-ray photoemission spectroscopy: Factors affecting quantitative results
Conard, T., Vandervorst, W., Bergmaier, A., Kimura, K.Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4704603
File:
PDF, 1.30 MB
english, 2012