Growth and nanostructure of conformal ruthenium films by...

Journal of Applied Physics 2003 Vol. 94; Iss. 1

Growth and nanostructure of conformal ruthenium films by liquid-source metalorganic chemical vapor deposition

Dey, S. K., Goswami, J., Das, A., Cao, W., Floyd, M., Carpenter, R.
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Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1576513
File:
PDF, 552 KB
english, 2003
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