Silicon oxynitride from microwave plasma: fabrication and...

Canadian Journal of Physics 1989 / 04 Vol. 67; Iss. 4

Silicon oxynitride from microwave plasma: fabrication and characterization

Blain, S., Klemberg-Sapieha, J. E., Wertheimer, M. R., Gujrathi, S. C.
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Volume:
67
Language:
english
Journal:
Canadian Journal of Physics
DOI:
10.1139/p89-033
Date:
April, 1989
File:
PDF, 416 KB
english, 1989
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