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Single-crysytal silicon pressure sensors with 500 × overpressure protection
Lee Christel, Kurt Petersen, Phillip Barth, Farzad Pourahmadi, Joseph Mallon Jr., Janusz BryzekVolume:
21
Year:
1990
Language:
english
Pages:
5
DOI:
10.1016/0924-4247(90)85017-x
File:
PDF, 428 KB
english, 1990