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A capacitive pressure sensor with low impedance output and active suppression of parasitic effects
B. Puers, E. Peeters, A. Van Den Bossche, W. SansenVolume:
21
Year:
1990
Language:
english
Pages:
7
DOI:
10.1016/0924-4247(90)85021-u
File:
PDF, 1.21 MB
english, 1990