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In situ friction and wear measurements in integrated polysilicon mechanisms
K.J. Gabriel, F. Behi, R. Mahadevan, M. MehreganyVolume:
21
Year:
1990
Language:
english
Pages:
5
DOI:
10.1016/0924-4247(90)85035-3
File:
PDF, 765 KB
english, 1990