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Silicon-on-insulator (SOI) structures for pressure sensors
Eugene I. Givargizov, Alexander B. Limanov, Gennadi D. Prjakhin, Vladimir I. VaganovVolume:
28
Year:
1991
Language:
english
Pages:
8
DOI:
10.1016/0924-4247(91)85010-l
File:
PDF, 1.05 MB
english, 1991