Optimization of capactive microphone and pressure sensor...

Sensors and Actuators A: Physical 1991 Vol. 26; Iss. 1-3

Optimization of capactive microphone and pressure sensor performance by capacitor-electrode shaping

J.A. Voorthuyzen, A.J. Sprenkels, A.G.H. Van Der Donk, P.R. Scheeper, P. Bergveld
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Volume:
26
Year:
1991
Language:
english
Pages:
6
DOI:
10.1016/0924-4247(91)87012-r
File:
PDF, 507 KB
english, 1991
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