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Frequency dependence of thermal excitation of micromechanical resonators
Theo S.J. Lammerink, Miko Elwenspoek, Jan H.J. FluitmanVolume:
27
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0924-4247(91)87071-a
File:
PDF, 377 KB
english, 1991