Resonating microbridge mass flow sensor with...

Sensors and Actuators A: Physical 1991 Vol. 27; Iss. 1-3

Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer

Rob Legtenberg, Siebe Bouwstra, Jan H.J. Fluitman
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Volume:
27
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0924-4247(91)87077-g
File:
PDF, 369 KB
english, 1991
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