[RTP 9th International Conference on Advanced Thermal...

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[RTP 9th International Conference on Advanced Thermal Processing of Semiconductors. RTP 2001 - Anchorage, AK, USA (25-29 Sept. 2001)] 9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001 - The UT/NIST/SA/ISMT Thermometry Test Bed - 2001

Ball, K.S., Huston, K.S., Noska, B.L., Simonich, M.A., Geyling, F.T., Sing, D., Tichy, R.S., Bharav, Y.
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Year:
2001
Language:
english
DOI:
10.1109/rtp.2001.1013760
File:
PDF, 944 KB
english, 2001
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