![](/img/cover-not-exists.png)
Analysis by FT-IR spectroscopy of SiO2-polycrystalline structures used in micromechanics: Stress measurements
J. Samitier, S. Marco, O. Ruiz, J.R. Morante, J. Esteve-Tinto, J. BausellsVolume:
32
Year:
1992
Language:
english
Pages:
7
DOI:
10.1016/0924-4247(92)80010-z
File:
PDF, 680 KB
english, 1992