Analysis by FT-IR spectroscopy of SiO2-polycrystalline...

Sensors and Actuators A: Physical 1992 Vol. 32; Iss. 1-3

Analysis by FT-IR spectroscopy of SiO2-polycrystalline structures used in micromechanics: Stress measurements

J. Samitier, S. Marco, O. Ruiz, J.R. Morante, J. Esteve-Tinto, J. Bausells
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Volume:
32
Year:
1992
Language:
english
Pages:
7
DOI:
10.1016/0924-4247(92)80010-z
File:
PDF, 680 KB
english, 1992
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