![](/img/cover-not-exists.png)
The effect of process parameter variation on polysilicon temperature transducer characteristics
O. Zucker, W. Langheinrich, J. MeyerVolume:
32
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0924-4247(92)80023-v
File:
PDF, 844 KB
english, 1992