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Compact Laser Interferometer for Translation and Tilt Metrology
Schuldt, Thilo, Gohlke, Martin, Weise, Dennis, Johann, Ulrich, Peters, Achim, Braxmaier, ClausVolume:
1
Language:
english
Journal:
International Journal of Optomechatronics
DOI:
10.1080/15599610701385537
Date:
June, 2007
File:
PDF, 1.04 MB
english, 2007