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Stress analysis of SiO2/Si bi-metal effect in silicon accelerometers and its compensation
H. Muro, H. Kaneko, S. Kiyota, P.J. FrenchVolume:
34
Year:
1992
Language:
english
Pages:
7
DOI:
10.1016/0924-4247(92)80138-s
File:
PDF, 398 KB
english, 1992