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Smart CMOS capacitive pressure transducer with on-chip calibration capability
F.V. Schnatz, U. Schöneberg, W. Brockherde, P. Kopystynski, T. Mehlhorn, E. Obermeier, H. BenzelVolume:
34
Year:
1992
Language:
english
Pages:
7
DOI:
10.1016/0924-4247(92)80142-p
File:
PDF, 292 KB
english, 1992