Effects of the magnetic field strength on the modulated pulsed power magnetron sputtering of metallic films
Lin, Jianliang, Moore, John J., Sproul, William D., Lee, S. L.Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3645612
File:
PDF, 2.23 MB
english, 2011