Mechanisms of optical activation of micromechanical...

Sensors and Actuators A: Physical 1992 Vol. 33; Iss. 3

Mechanisms of optical activation of micromechanical resonators

Rebwar M.A. Fatah
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Volume:
33
Year:
1992
Language:
english
Pages:
8
DOI:
10.1016/0924-4247(92)80170-8
File:
PDF, 945 KB
english, 1992
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