[IEEE 2010 22nd International Conference on Indium...

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[IEEE 2010 22nd International Conference on Indium Phosphide and Related Materials (IPRM) - Takamatsu, Japan (2010.05.31-2010.06.4)] 2010 22nd International Conference on Indium Phosphide and Related Materials (IPRM) - Submicron InP/InGaAs composite channel MOSFETs with selectively regrown N+-source/drain buried in channel undercut

Kanazawa, Toru, Wakabayashi, Kazuya, Saito, Hisashi, Terao, Ryosuke, Tajima, Tomonori, Ikeda, Shunsuke, Miyamoto, Yasuyuki, Furuya, Kazuhito
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Year:
2010
Language:
english
DOI:
10.1109/iciprm.2010.5515922
File:
PDF, 515 KB
english, 2010
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