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Silicon whiskers for mechanical sensors
V. Voronin, I. Maryamova, Y. Zaganyach, E. Karetnikova, A. KutrakovVolume:
30
Year:
1992
Language:
english
Pages:
7
DOI:
10.1016/0924-4247(92)80193-7
File:
PDF, 681 KB
english, 1992