Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2009 Vol. 27; Iss. 3
Study on structure optimization of a piezoelectric cantilever with a proof mass for vibration-powered energy harvesting system
Li, Yanning, Li, Wen, Guo, Tong, Yan, Zhidan, Fu, Xing, Hu, XiaotangVolume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3119677
File:
PDF, 462 KB
english, 2009