Characterization of piezoelectric properties of zinc oxide...

Sensors and Actuators A: Physical 1992 Vol. 33; Iss. 1-2

Characterization of piezoelectric properties of zinc oxide thin films deposited on silicon for sensors applications

J.L. Deschanvres, P. Rey, G. Delabouglise, M. Labeau, J.C. Joubert, J.C. Peuzin
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Volume:
33
Year:
1992
Language:
english
Pages:
3
DOI:
10.1016/0924-4247(92)80223-p
File:
PDF, 225 KB
english, 1992
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