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Rapid thermal annealing of LPCVD-SOI substrates for sensor applications
P. Jeanjean, P. Sellitto, J. Sicart, J.L. Robert, M. Le Berre, G. Chaussemy, P. PinardVolume:
33
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0924-4247(92)80230-z
File:
PDF, 275 KB
english, 1992