A high sensitivity CMOS gas flow sensor on a thin...

Sensors and Actuators A: Physical 1993 Vol. 37-38; Iss. none

A high sensitivity CMOS gas flow sensor on a thin dielectric membrane

David Moser, Henry Baltes
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Volume:
37-38
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0924-4247(93)80008-5
File:
PDF, 996 KB
english, 1993
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