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Relation between electrical conductivity and structural characteristics in boron-doped LPCVD polycrystalline silicon used in sensor devices
S. Marco, O. Ruiz, J. Samitier, J.R. Morante, J. BausellsVolume:
37-38
Year:
1993
Language:
english
Pages:
6
DOI:
10.1016/0924-4247(93)80014-8
File:
PDF, 907 KB
english, 1993