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TMAH/IPA anisotropic etching characteristics
A. Merlos, M. Acero, M.H. Bao, J. Bausells, J. EsteveVolume:
37-38
Year:
1993
Language:
english
Pages:
7
DOI:
10.1016/0924-4247(93)80125-z
File:
PDF, 1.29 MB
english, 1993