Comparison of techniques for measuring both compressive and tensile stress in thin films
B.P. van Drieënhuizen, J.F.L. Goosen, P.J. French, R.F. WolffenbuttelVolume:
37-38
Year:
1993
Language:
english
Pages:
10
DOI:
10.1016/0924-4247(93)80128-4
File:
PDF, 1.13 MB
english, 1993