Initial study on the fabrication of a sub-millimetre polysilicon gear
Su Yi, Zhao Xin-An, Tan Songsheng, Wang WeiyuanVolume:
35
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0924-4247(93)80148-a
File:
PDF, 872 KB
english, 1993