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[IEEE 2011 IEEE International Electron Devices Meeting (IEDM) - Washington, DC, USA (2011.12.5-2011.12.7)] 2011 International Electron Devices Meeting - Gallium nitride-on-silicon micromechanical overtone resonators and filters

Ansari, Azadeh, Gokhale, Vikrant J., Thakar, Vikram A., Roberts, John, Rais-Zadeh, Mina
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Year:
2011
Language:
english
DOI:
10.1109/iedm.2011.6131590
File:
PDF, 805 KB
english, 2011
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