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Application of oxygen plasma processing to silicon direct bonding
O. Zucker, W. Langheinrich, M. Kulozik, H. GoebelVolume:
36
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0924-4247(93)80197-o
File:
PDF, 1.25 MB
english, 1993