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[IEEE Extended Abstracts of the Fourth International Workshop on Junction Technology - Shanghai, China (15-16 March 2004)] The Fourth International Workshop on Junction Technology, 2004. IWJT '04. - Characteristics of low-temperature preannealing effects on laser-annealed P/sup +//N and N/sup +//P ultra-shallow junctions
Sungkweon Baek,, Sungho Heo,, Hyejuncg Choi,, Hyunsang Hwang,Year:
2004
Language:
english
DOI:
10.1109/iwjt.2004.1306757
File:
PDF, 275 KB
english, 2004