Electrical and piezoresistive properties of boron-implanted...

Sensors and Actuators A: Physical 1993 Vol. 36; Iss. 3

Electrical and piezoresistive properties of boron-implanted ZMR-SOI films

P. Jeanjean, J. Sicart, J.L. Robert, D. Dutartre, V. Conedera
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Volume:
36
Year:
1993
Language:
english
Pages:
5
DOI:
10.1016/0924-4247(93)80199-q
File:
PDF, 446 KB
english, 1993
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