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The radio frequency magnetic field effect on electron heating in a low frequency inductively coupled plasma
Chung, ChinWook, Seo, Sang-Hun, Chang, Hong-YoungVolume:
7
Year:
2000
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.1286804
File:
PDF, 297 KB
english, 2000