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Impurity dependence of oxide defects in Czochralski silicon
Itsumi, Manabu, Akiya, Hideo, Tomita, Masato, Ueki, Takemi, Yamawaki, MasatakaVolume:
80
Year:
1996
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.363790
File:
PDF, 420 KB
english, 1996