Optical properties of carbon and carbon nitride films...

Optical properties of carbon and carbon nitride films prepared by mass-separated energetic negative carbon and carbon nitrogen ions

Tsubouchi, Nobuteru, Enders, Burkhard, Chayahara, Akiyoshi, Kinomura, Atsushi, Heck, Claire, Horino, Yuji
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581776
File:
PDF, 376 KB
english, 1999
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