![](/img/cover-not-exists.png)
Optical properties of carbon and carbon nitride films prepared by mass-separated energetic negative carbon and carbon nitrogen ions
Tsubouchi, Nobuteru, Enders, Burkhard, Chayahara, Akiyoshi, Kinomura, Atsushi, Heck, Claire, Horino, YujiVolume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581776
File:
PDF, 376 KB
english, 1999