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[IEEE Ninth International Workshop on Micro Electromechanical Systems - San Diego, CA, USA (11-15 Feb. 1996)] Proceedings of Ninth International Workshop on Micro Electromechanical Systems - Development of mass productive micro stereo lithography (Mass-IH process)
Ikuta, K., Ogata, T., Tsubio, M., Kojima, S.Year:
1996
Language:
english
DOI:
10.1109/memsys.1996.493998
File:
PDF, 818 KB
english, 1996