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Synchrotron radiation induced chemical vapor deposition of...

Synchrotron radiation induced chemical vapor deposition of thin films from metal hexacarbonyls

Mancini, Derrick C.
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Volume:
8
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.585163
Date:
November, 1990
File:
PDF, 676 KB
english, 1990
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