Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1990 / 11 Vol. 8; Iss. 6
Synchrotron radiation induced chemical vapor deposition of thin films from metal hexacarbonyls
Mancini, Derrick C.Volume:
8
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.585163
Date:
November, 1990
File:
PDF, 676 KB
english, 1990