Reduction of heat loss of silicon membranes by the use of trenchetching techniques
J. Werno, R. Kersjes, W. Mokwa, H. VogtVolume:
42
Year:
1994
Language:
english
Pages:
4
DOI:
10.1016/0924-4247(94)80057-x
File:
PDF, 345 KB
english, 1994