A silicon-silicon nitride membrane fabrication process for...

Sensors and Actuators A: Physical 1994 Vol. 42; Iss. 1-3

A silicon-silicon nitride membrane fabrication process for smart thermal sensors

P.M. Sarro, A.W. van Herwaarden, W. van der Vlist
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Volume:
42
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0924-4247(94)80072-3
File:
PDF, 1.29 MB
english, 1994
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