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PSG layers for surface micromachining
D. Poenar, P.J. French, R. Mallée, P.M. Sarro, R.F. WolffenbuttelVolume:
41
Year:
1994
Language:
english
Pages:
6
DOI:
10.1016/0924-4247(94)80128-2
File:
PDF, 550 KB
english, 1994